Abstract: The development level of high-tech industry is related to the comprehensive competitiveness of a country or region. Scientific and effective evaluation of the innovation process efficiency of regional high-tech industry is of great significance to enhance the innovation ability of high-tech industry. This paper uses the three-stage chain relational network DEA model to measure the overall efficiency and three sub stage efficiency of high-tech industry innovation in China's provincial regions, and analyzes the correlation effectiveness between the sub stages of innovation system and the differences of regional innovation process efficiency. The overall efficiency and three-stage efficiency in China's high-tech industry have been improved to varying degrees, but on the whole, the value of innovation efficiency is not high, especially in the overall innovation efficiency and the efficiency of achievement transformation. Through the classification analysis of innovation efficiency, it is found that only a few regions have relatively high efficiency in the three stages of knowledge production, technology research and development and achievement transformation, which indicates that the innovation efficiency of most regions in China is not high. It is necessary to take corresponding measures to improve according to the low efficiency link in the innovation process.

摘要： 高技术产业的发展水平关系到一个国家或地区的综合竞争力，科学有效地对区域高技术产业创新过程效率进行评价，对于提升高技术产业的创新能力具有重要意义。本文运用三阶段链式关联网络DEA模型，测算了我国省级区域高技术产业创新整体效率及三个子阶段效率，对创新系统子阶段间的关联有效性以及区域创新过程效率的差异性进行了分类分析。我国高技术产业创新整体效率及三个子阶段效率都有不同程度的提升，但总体来看创新效率值都不高，特别是整体创新效率和成果转化阶段的效率较低；通过对创新效率进行分类分析，发现仅少数区域在知识生产、技术研发和成果转化三个阶段的效率都比较高，表明我国大部分地区创新效率不高，需要根据创新过程中的低效环节，采取相应措施进行改进。