Abstract: This paper firstly analyzed the influence factors of the illegal using behaviors of research funds, and built three-dimensional structure model based on regulation factor, administration factor and personal factor. On this basis, we considered the interrelationship and correlation effect among influence factors, and integrated the Linguistic 2-Tuples model with the DEMATEL approach to process and aggregate the linguistic terms provided by experts, and furthermore categorized and ranked the influence factors of the using behaviors of research funds. It had been found that the awareness of researchers on funds using is the key influence factor in using behaviors of research funds, and is also the mostly easy one to be influenced by other influence factors. The using system of the research funds is the most active influence factor among the regulation factors. Penalty mechanism on illegal use of research funds is the easiest one having effects on other influence factors. Finally, corresponding strategies and suggestions are provided based on the above analysis.