Abstract: Abstract: the survival of Chinese R&D firm is the key for the implementation of development strategy of Chinese innovation policy. Presently, part of R&D firms appears behavior distorted, which lead to another purpose in product innovation. The fact makes the survival of Chinese R&D firm are both complicated and considerable research value. The paper uses event history analysis method in the field of biological and extended Cox model to trace the living situation and survival premium. The paper finds, first, Chinese R&D firm does not exist a significant survival premium, once exclude zombie firms, the survival premium can reduce 7.25% survival risk; Second, there is not simple linear relationship between R&D intensity and survival, which appears roughly "U" shaped; Finally, substantive innovation R&D firm can significantly reduce the risk of survival and has larger survival premium, however, R&D behavior distorted firm has not exist survival premium effect. This conclusion reveals that an important reason of the R&D firm in China generally has no obvious survival premium is research behavior distorted swallowed a survival premium of substantive innovation R&D firm. Then, when China is implementing innovation incentive policies to carry out substantive innovation, they establish the corresponding mechanism to reverse the distortion of research behavior at the same time.