Abstract: Digital technology is the core driving force of the digital economy. Its deep integration with the real economy accelerates the optimization and reconstruction of the production factor system, and gives birth to digital production factors. Taking digital technology as a technology empowering production factors, we expand digital technology to capital-enabling technology and labor-enabling technology. Then we introduce the CES production function to derive the TFP growth formula, which clearly shows the path of digital technology empowerment. Based on the panel data of 27 sub-sectors of China's manufacturing sector from 1990 to 2018, parameter estimation is conducted. It is found that digital technology is the main driving force for the growth of TFP. The annual growth rate of TFP in China’s manufacturing industry is 4.9% while digital technology contributes 4.1%. Digital technology and factor allocation are biased towards capital. The elasticity of substitution of capital to labor under the digital background is 0.763 (complementary relationship). Both the digital technology bias and the element allocation bias have evolved from suppression to promotion. The interactive items between them have evolved from promotion to suppression, showing the characteristics of an inverted U.