Abstract: The emergence of controversial emerging technologies, such as nanotechnology, genetic engineering, and artificial intelligence, has led to the discussion on the governance of emerging technology in both research and practice. As a new perspective of scientific and technological innovation, responsible innovation provides a theoretical paradigm basis for the discussion on governance challenges caused by negative externalities and risks of emerging technologies. The research focuses on the issue of governance of emerging technologies, and makes a systematic review based on the perspective of responsible innovation, so as to provide systematic implications for the theoretical research and policy practice of emerging technology governance. The research shows that: the existing literature on the governance of emerging technologies involves three research streams, namely the process perspective, the action perspective, and the governance system’s structure perspective. Moreover, based on the responsible innovation paradigm, the governance of emerging technology has emerged five major literature streams, involving the goal-setting perspective, the actor participation perspective, the value criterion coordination perspective, the process response perspective, and the institution construction perspective.