Abstract: Based on the panel data of the 1995-2012 China Statistics Yearbook on high-tech industry, five primary high-tech industries were analyzed. By means of the differential GMM model and the system GMM model, this paper analyzed characteristics of market profits, market share of foreign capital and market concentration in promoting the innovations industrialization of China's high-tech industry. Found that, enhance the level of market profits moderately, will help to improve the industrialization performance of innovations; The market share of foreign capital had an inverted U-shaped impact on the industrialization performances of innovations, so more attention should be paid to the issues of excessive foreign capital in Chinese high-tech industries; the market concentration had a significant role in promoting the industrialization performances of innovations, so the increase of market concentration moderately can be tolerated. Besides, we also found that, innovations industrialization activities had a positively cumulative effect in different periods, so the constancy of innovations industrialization activities should be strengthened. The conclusions and recommendations can provide reference for the innovations transformation of china's high-tech industry.