Abstract: This paper analyzes the mechanism black-box of element agglomeration effect on the performance of high and new technology industry based on the development of economy and high quality, building a threshold effect model, collecting 2004-2018 China's 30 provinces, municipalities directly unde related data r the central government, autonomous region, the element agglomeration of high-tech industry, high quality and economic development, and innovation performance, measure and compare the different factor accumulation effect size. Using Arcgis software to carry out spatial visualization analysis. The results show that :(1) there is a positive marginal decreasing effect of factor agglomeration on the performance of high-tech industry. (2) Compared with R&D personnel, the agglomeration effect of R&D funds is greater. (3) The level of high-quality economic development positively regulates the improvement effect of innovation factor agglomeration on the performance of high-tech industry, and its regulating effect is increasing marginal. (4) Innovation factor agglomeration and high-quality economic development and high-level areas are mainly developed in the eastern coastal areas; There are many regions with low degree of research and development fund concentration. Based on this, the paper puts forward some suggestions to improve the performance of high-tech industry effectively.