Abstract: Frontier research focuses on the impact of informatization on innovation efficiency. With the development of digital technology, few studies have investigated the role of digital technology on innovation efficiency, nor have they paid attention to the test of its mechanism of action and whether there is heterogeneity in the effect. Based on this, this paper uses panel data of 30 regions in China from 2007 to 2020 to test the impact of digital technology on innovation efficiency and its mechanism, and further investigate the heterogeneous impact of different government attention, different R&D intensity and different geographical locations. Research findings: first, on the whole, digital technology can significantly improve the efficiency of regional innovation. This conclusion is still valid after the robustness test and instrumental variable regression. Second, the test of the mechanism of digital technology on innovation efficiency shows that digital technology improves regional innovation efficiency through human capital accumulation, knowledge spillover and optimization of innovation factor allocation. Third, further analysis shows that there is heterogeneity in the impact of digital technology on regional innovation efficiency. In areas with high government attention, high R&D intensity and geographical advantages, the promotion of digital technology on innovation efficiency is more obvious.